Atomic Layer Deposition of Halide Perovskites and Other Metal Iodides
Marianna Kemell a, Georgi Popov b, Alexander Weiß c, Timo Hatanpää a, Aida Heidari a, Markku Leskelä a, Mikko Ritala a
a Department of Chemistry, University of Helsinki, P.O. Box 55, Helsinki, 00014, Finland
b Present address: ASM Microchemistry Oy, Helsinki, Finland
c Present address: Applied Materials GmbH, Dresden, Germany
Proceedings of MATSUS Fall 2025 Conference (MATSUSFall25)
A.1. Halide Perovskites - Properties, Synthesis and Advanced Characterization - #PeroProp
València, Spain, 2025 October 20th - 24th
Organizers: Kunal Datta and Selina Olthof
Invited Speaker, Marianna Kemell, presentation 043
Publication date: 17th July 2025

Metal iodide thin films have gained a lot of attention during the recent decade. Although their applications cover a variety of technological fields, majority of the research is motivated by photovoltaics. Halide perovskites are the most studied metal iodides for photovoltaics. Halide perovskite solar cells are made from abundant and low-cost materials, yet they show high solar conversion efficiencies. Unfortunately, some of the halide perovskites show poor chemical and thermal stability. In addition, the presence of lead in the best-performing materials causes concern. These issues have recently drawn attention to other types of materials including Ag2BiI5 and Cs3Bi2I9, for example. Halide perovskites are expected to find their main application in tandem solar cells with silicon, and the same may be true also for Ag2BiI5, Cs3Bi2I9 and related materials.

Large-scale applications of halide perovskite and other metal iodide thin films require scalable and well-controllable deposition methods. The currently used methods are simple and low-cost but are difficult to scale up for industrial mass production of solar cells. Atomic layer deposition (ALD) is well known for its unique controllability and excellent scalability and has therefore a lot to give also in the field of metal iodide films. We have developed, as the first team in the world, ALD processes for various metal iodides. We started by developing processes for the binary iodides PbI2 [1], CsI [2], and SnI2 [3]. All these processes use metal silylamides as the metal precursors and SnI4 as the iodine precursor. The binary processes can be combined to make more complex materials: so far we have made the inorganic halide perovskites CsPbI3 [2] and CsSnI3 [3] by combining CsI with PbI2 and SnI2, respectively. CH3NH3PbI3 can be prepared as well by exposing PbI2 to CH3NH3I vapor [1]. We recently designed a new iodine source that produces anhydrous HI vapor on-site and overcomes thus the limitations of SnI4 such as high cost and tin contamination in the deposited films. We have demonstrated the feasibility of the source by depositing CsI.

Our most recent efforts are directed towards Ag2BiI5, Cs3Bi2I9 and related materials. As the first steps, we have developed ALD processes for the silver halides AgCl, AgBr and AgI. We are currently working on an ALD process for bismuth iodide BiI3. Also, the first experiments aiming to combine AgI and BiI3 to ternary iodides are underway.

The authors thank the Research Council of Finland (Decision number 330086) and the Niilo Helander Foundation (Grant number 230032) for funding. The work was conducted in the ALD center Finland infrastructure.

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