Publication date: 17th July 2025
Current research in thin-film deposition emphasizes compatibility with large-scale manufacturing, reproducibility, and uniformity. Although thermal vacuum deposition has long been established in the semiconductor and OLED industries, applying this technique to hybrid perovskite materials remains particularly challenging. The complexity arises primarily from their unconventional sublimation behaviors, characterized by abnormal adsorption dynamics and difficulties in precise process control. In this presentation, I will first elucidate the distinctive sublimation mechanisms and deposition kinetics associated with hybrid perovskites, highlighting how these differ fundamentally from traditional thermal evaporation of conventional inorganic materials. Subsequently, I will introduce our novel solutions to overcome these challenges, including the implementation of a meticulously designed deposition protocol combined with a specifically tailored evaporator system capable of real-time, precise process control. Leveraging these advancements, we successfully fabricated perovskite solar cells with power conversion efficiencies exceeding 25% in conventional n-i-p architectures, demonstrating remarkable batch-to-batch reproducibility. Additionally, I will discuss our recent progress on vacuum-deposited modules exceeding 200 cm², illustrating the significant industrial interest and considerable potential of vacuum-based techniques for perovskite photovoltaic commercialization.