Proceedings of nanoGe Fall Meeting 2021 (NFM21)
Publication date: 23rd September 2021
Methylammonium lead iodide (MAPbI3), which has been used as a light-absorbing layer in perovskite solar cells (PSCs), is a promising active material for optoelectronic devices because of its excellent properties such as direct bandgap, high absorption coefficient in the visible region, and ambipolar transport of charge carriers [1][2]. However, PSCs, which are usually prepared by the solution process, have low stability against moisture [3], and it is challenging to form a uniform film over a large area via mainstream spin-coating methods [4]. Therefore, the solution process is a major challenge for perovskite solar cells' stability and mass production. In this regard, we focused on the sputtering method, a technology that can eliminate the effects of water and solvents and produce a large amount of thin-film material with high uniformity. In this study, perovskite layers were fabricated by sputtering and gas-phase reaction. The perovskite films were fabricated using sputtered Lead Sulfide (PbS, 99.999%), which was converted into MAPbI3 by employing the gas-phase reaction. Sputtering can produce dense films at high pressure and porous films at low pressure [5]. Compared to dense films, porous films are more reactive with gas-phase reaction, and the desired film can be uniformly formed [6]. In this study, MAPbI3 was prepared by focusing on the film quality and gas (Iodine, Methylammonium Iodide) reactivity with the sputtered PbS thin films. The PbS films were prepared at sputtering pressures of 0.3, 1, and 3 Pa, and the effect of deposition pressure on the conversion to MAPbI3 was investigated. X-ray diffraction (XRD) and UV/Vis spectroscopy measurements confirmed that sputtered MAPbI3 perovskite films were synthesized. From the cross-sectional SEM observation of sputtered films deposited on Si substrates with random pyramidal structures, it was found that homogeneous perovskite films could be formed on substrates with large roughness. These results will contribute to the development of the PSCs field and other research fields such as tandem solar cells.
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