Deposition rate limitations for FA-based co-evaporated perovskites and how to overcome them
Thomas Feeney a b, Aleksandra Miaskiewicz c, Julian Petry b, Felix Laufer a, Roja Singh a b, Stefanie Severin c, Viktor Škorjanc c, Alexander Diercks a, Suresh Maniyarasu c, Lars Korte c, Steve Albrecht c d, Ulrich W. Paetzold a b, Marcel Roß a b, Paul Fassl a b
a Light Technology Institute (LTI), Karlsruhe Institute of Technology (KIT), Engesserstrasse 13, 76131 Karlsruhe, Germany.
b Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany.
c Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (HZB), Hahn Meitner Platz 1, Berlin, Germany
d Faculty of Electrical Engineering and Computer Science, Technical University Berlin, Marchstraße 23, 10587 Berlin, Germany
NIPHO25
Proceedings of International Conference on Perovskite Thin Film Photovoltaics and Perovskite Photonics and Optoelectronics (NIPHO25)
Cagliari, Italy, 2025 June 9th - 10th
Organizers: Giulia Grancini, Daniela Marongiu and Aldo Di Carlo
Oral, Thomas Feeney, presentation 025
Publication date: 24th April 2025

              Vapor phase deposition of perovskites is often considered a suitable deposition method for uniform deposition on large-area substrates with minimal upscaling losses. For this reason, it is assumed to be suitable for industrial-scale perovskite deposition. However, concerns regarding their practical deposition rates have entered the discourse, since deposition rates of ~1000 nm.min-1 are typically considered necessary for the technology to be commercially viable. This is of particular concern for co-evaporation of perovskites, which is one of the most common vapor-based fabrication techniques, with typical deposition rates of 6 – 10 nm.min-1 reported in literature.[1] Some research into MAPbI3 has aimed to increase deposition speed without compromising device power conversion efficiency (PCE), achieving maximum deposition rates of ~26 nm.min-1.[2,3] However, there has been no such research on formamidinium (FA)-based perovskites, or for wide bandgap perovskites suitable for tandem applications. A significant reason for this deficit is the propensity of FA to decompose at high temperatures, such as those required for elevated deposition rates, and a lack of understanding how this will impact device PCE.[4]

              In response, we present the first attempt to significantly increase FA-based perovskite deposition speed and analyze the impact of increasing deposition rate on device PCE. Our investigation reveals a negative correlation between deposition rate of FA based co-evaporated perovskites and device power conversion efficiency. Furthermore, high deposition rates will also negatively impact process repeatability. On a device level, the cause of these PCE drops are the emergence of μm-scale inhomogeneities in our perovskite film. Our investigation explores the root cause of these inhomogeneities, demonstrating that they are not the result of the classical degradation products of FAI, which we demonstrate using in situ mass spectrometry. Instead, temperature variations within the residual crucible material leads to the formation of coke products, which are subsequently deposited onto the perovskite as spit defects. 

              During our investigation, we analyzed multiple solutions to improve sample homogeneity and reduce PCE losses when increasing deposition rate, separated into two independent approaches. The first approach utilizes vertical scaling methods, which reduces the loss in PCE from ~23%rel to ~9%rel for devices with a ~18 nm.min-1 deposition rate compared to a baseline of 5 nm.min-1. The second approach utilizes preconditioning, reducing PCE loss from ~31%rel to ~26%rel for devices with ~21 nm.min-1 deposition rate compared to a baseline 6 nm.min-1. Our work represents the first attempt to meaningfully increase FA-based wide bandgap perovskite deposition rate while maintaining high efficiency and will facilitate future developments in this field.

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