Vacuum Deposition of Triple-Halide Wide-Bandgap Perovskites Enabled by Sublimation of Mixed Organic-Halide Pellets
Manuel Piot a, Lidón Gil-Escrig a, Federico Ventosinos a b, Cristina Roldán-Carmona a, Anna Robinson c, Javier Schmidt b, Michele Sessolo a, Henk Bolink a
a Instituto de Ciencia de los Materiales- Universidad de Valencia, Catedrático José Beltrán, 2, 46071, Valencia, Spain
b Instituto de Física del Litoral (IFIS-Litoral), CONICET-UNL, Güemes 3450, S3000GLN, Santa Fe, Argentina
c Oxford Photovoltaics Ltd, Unit 7/8 Mead Road, Yarnton, OX5 1QU, United Kingdom
Proceedings of MATSUS Fall 2025 Conference (MATSUSFall25)
A5 Advances in Vacuum and Hybrid Deposition of Halide Perovskite - #PeroVac
València, Spain, 2025 October 20th - 24th
Organizers: Annalisa Bruno, Monica Morales Masis and Kassio Zanoni
Oral, Manuel Piot, presentation 423
Publication date: 21st July 2025

Co-evaporated perovskite holds multiple advantages in comparison to deposition via solution processes, such as conformal deposition on textured substrates and upscalability to large-area devices [1][2]. However, controlling the sublimation rates of organic precursors such as MAI or MACl remains challenging. Their low sticking coefficient on Quartz Crystal Microbalances and their purity-dependent sublimation behavior complicates the monitoring of depositions rates and affects the process reproducibility. This problem becomes especially critical when multiple organic precursor sources are used.

In this work we present a novel approach to sublime organic materials by pressing the precursor powder into a pellet. We observe that using a pellet leads to a lower material consumption as well as a lower pressure inside the chamber during the initial heating stage. Additionally, the pellet can incorporate multiple organic compounds, allowing the simultaneous sublimation of methylammonium iodide and chloride (MAI and MACl) without the requirement of an extra source. We use this pellet alongside a Pb(I1-­xBrx)2 source to deposit a triple-halide MAPIBrCl perovskite with different amount of chloride, determined by the MACl proportion in the pellet. The inclusion of chloride in the perovskite lattice is confirmed by photoluminescence, X-ray diffraction and X-ray fluorescence measurements, in contraste with other reports where MACl helps the crystallization stage of the film but leaves during annealing. Adding chloride proves to be beneficial for the charge transport properties of the film, which translates to a higher fill factor in solar cells. As such, a champion power conversion efficiency of 19.5% was obtained for a 1.66 eV bandgap perovskite.

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