Ultrathin ALD-grown SiO2 layers on copper-based electrodes: enhanced ethylene selectivity and improved stability during CO2 electroreduction
Dalia Leon-Chaparro a, Ruud van Ommen b, Ruud Kortlever a
a Process & Energy Department, Faculty of Mechanical Engineering, Delft University of Technology
b Chemical Engineering Department, Faculty of Applied Sciences, Delft University of Technology
Proceedings of MATSUS Fall 2026 Conference (MATSUSFall26)
C3 Current bottlenecks of the industrial application of CO2 electrolysis
Palma, Spain, 2026 October 26th - 30th
Organizers: Balazs Endrodi and Kevinjeorjios Pellumbi
Oral, Dalia Leon-Chaparro, presentation 318
Publication date: 22nd July 2026

Copper-based catalysts are among the most promising materials for the electrochemical reduction of CO2 to multicarbon products such as ethylene; however, their performance is often limited by instability, surface restructuring, and competing reaction pathways1,2. In this work, we investigate the use of ultrathin silica (SiO2) layers grown by atomic layer deposition (ALD) on copper oxide nanoparticles to tune the catalyst-electrolyte interface and improve performance in a membrane electrode assembly (MEA) configuration.

Silica layers were deposited in a fixed-bed ALD reactor using a controlled number of cycles from 5 to 30 cycles. The ALD process was further optimized to reduce residual chlorine species by adjusting purge conditions, leading to improved surface quality and more reliable interfacial properties. Silica and other oxide slayers have been testing for different electrochemical reactions showing a strong permeability and selectivity for specific species without affect the electrocatalytic activity3–5

Initial results show that ultrathin coatings (5 ALD cycles) not only preserve catalytic activity but also enhance selectivity toward ethylene. At higher current densities 200 mA/cm2 , silica-modified electrodes exhibit a comparable faradaic efficiency for C2H4 compared to bare copper, along with a decrease in CO formation, indicating a shift in reaction pathways driven by interfacial effects. These findings suggest that the SiO2 layer acts as a proton-permeable, semi-transparent interface that tunes the local reaction environment without blocking active sites.

Electrochemical impedance spectroscopy (EIS) was used to probe resistance changes within the MEA configuration as a function of coating thickness, providing insight into transport and interfacial phenomena. Furthermore, inductively coupled plasma (ICP) analysis revealed no detectable copper dissolution for silica-coated nanoparticles, highlighting the protective role of the ultrathin SiO2 layer under electrolysis conditions. Complementary characterization by X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) supports the structural and chemical stability of the coated systems before and after electrolysis.

Overall, this work demonstrates that ultrathin ALD-grown silica layers provide an effective strategy to enhance ethylene selectivity while improving catalyst stability, emphasizing the importance of nanoscale interface engineering in CO2 electroreduction systems.

Rens Kamphorst for his idea of fixed-bed reactor to coat the Cu nanoparticles. 

Shilong Fu & Kevin Fernandez-Caso for them help building the set-up for CO2 electrolysis. 

Athina Athina Tzavara Roussi and Bhavesh Chavan for XPS measurements.

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