DOI: https://doi.org/10.29363/nanoge.incnc.2021.051
Publication date: 8th June 2021
Nanocrystal micro-/nanoarrays with multiplexed functionalities are of broad interest in the field of nanophotonics, cellular dynamics, and biosensing due to their tunable electrical and optical properties. This work focuses on the multicolor patterning of two-dimensional nanoplatelets via two sequential self-assembly and direct electron-beam lithography steps. First, CdSe/ZnyCd1-yS and CdSe1-xSx/ZnS core/shell nanoplatelets (NPLs) are synthesized as building blocks. They are utilized later as red- and green-emitting layers, respectively. Next, large-area NPL thin films with controlled orientation are fabricated based on Langmuir-type self-assembly at the liquid/air interface. By varying the concentration of ligands in the subphase, we investigate the effect of interaction potential on the film's final characteristics to prepare thin superlattices suitable for the patterning step. Equipped with the ability to fabricate a uniform superlattice with a controlled thickness, we finally perform nanopatterning on a thin film of NPLs utilizing direct electron-beam lithography technique. The effect of acceleration voltage, aperture size, and e-bam dosage on the nanopattern's resolution and fidelity is investigated for both of the presented 2D NPLs. Our results indicate that clear and high-resolution nanopatterns can be obtained at an acceleration voltage of 10 kV, the electron dosage of 300 μC cm-2, the aperture size of 30 μm, and under an e-beam current of 174 pA. By using scanning electron microscopy (SEM), atomic force microscopy (AFM), and fluorescence microscopy, we demonstrate the successful fabrication of multicolor fluorescent nanoarrays with the thickness of only 2-3 monolayers (7-10 nm) and the feature line width of ~40 nm, which is three to four NPLs wide. The obtained multicolor micro-/nanoarrays provide us an innovative experimental platform to investigate biological interactions as well as Föster resonance energy transfer.
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